TBCl etching for uniform-diameter InAsP nanowires
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Year
: 2014DOI: 10.1109/Group4.2014.6961930
Keyword(s): biosensors,chemical sensors,elemental semiconductors,integrated optics,optical fabrication,optical resonators,optical sensors,silicon,Si,detection sensitivity,differential Si ring-resonator biosensors,process variations,prostate specific antigen,sucrose solution,Biosensors,Scattering,Sensitivity,Silicon,Sugar,Temperature sensors
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TBCl etching for uniform-diameter InAsP nanowires
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| contributor author | Tateno, K. , Guoqiang Zhang , Gotoh, H. | |
| date accessioned | 2020-03-12T20:37:44Z | |
| date available | 2020-03-12T20:37:44Z | |
| date issued | 2014 | |
| identifier other | 6880533.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1020105?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | TBCl etching for uniform-diameter InAsP nanowires | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8144539 | |
| subject keywords | biosensors | |
| subject keywords | chemical sensors | |
| subject keywords | elemental semiconductors | |
| subject keywords | integrated optics | |
| subject keywords | optical fabrication | |
| subject keywords | optical resonators | |
| subject keywords | optical sensors | |
| subject keywords | silicon | |
| subject keywords | Si | |
| subject keywords | detection sensitivity | |
| subject keywords | differential Si ring-resonator biosensors | |
| subject keywords | process variations | |
| subject keywords | prostate specific antigen | |
| subject keywords | sucrose solution | |
| subject keywords | Biosensors | |
| subject keywords | Scattering | |
| subject keywords | Sensitivity | |
| subject keywords | Silicon | |
| subject keywords | Sugar | |
| subject keywords | Temperature sensors | |
| identifier doi | 10.1109/Group4.2014.6961930 | |
| journal title | ndium Phosphide and Related Materials (IPRM), 26th International Conference on | |
| filesize | 276542 | |
| citations | 0 |