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Influence of Collimation on Alignment Accuracy in Proximity Lithography

Type: Journal Paper

Author : Nan Wang; Wei Jiang; Jiangping Zhu; Yan Tang; Wei Yan; Junmin Tong; Song Hu

Publisher: IEEE

Year: 2014

A Moiré-Based Four-Channel Focusing and Leveling Scheme for Projection Lithography

Type: Journal Paper

Author : Chengliang Di; Wei Yan; Song Hu; Yanli Li; Didi Yin; Yan Tang; Junmin Tong

Publisher: IEEE

Year: 2014

Interferometric Scheme for High-Sensitivity Coaxial Focusing in Projection Lithography

Type: Journal Paper

Author : Chengliang Di; Song Hu; Wei Yan; Yanli Li; Guang Li; Junmin Tong

Publisher: IEEE

Year: 2014

Author

Junmin Tong (3)

Song Hu (3)

Wei Yan (3)

Chengliang Di (2)

Yan Tang (2)

Yanli Li (2)

Didi Yin (1)

Guang Li (1)

Jiangping Zhu (1)

Nan Wang (1)

Publisher

IEEE (3)

Year

2014 (3)

Keywords

#x0301 (2)

Accuracy (2)

focal plane (2)

focal planes (2)

Gratings (2)

Lithography (2)

moire fringes (2)

moire&amp (2)

Optical imaging (2)

photolithography (2)

Type

Journal Paper (3)

Language (ISO)

English (3)

Content Type

Metadata Only (3)

Publication Title

Photonics Journal, IEEE (3)

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