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Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

Type: Conference Paper

Author : Schulze, J.; Schuengel, E.; Derzsi, A.; Korolov, I.; Donko, Z.

Publisher: IEEE

Year: 2014

The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas

Type: Conference Paper

Author : Schulze, J.; Schuengel, E.; Korolov, I.; Derzsi, A.; Donko, Z.

Publisher: IEEE

Year: 2014

Kinetic simulation of mode transitions and hysteresis effects in low pressure capacitive discharges

Type: Conference Paper

Author : Wilczek, S.; Trieschmann, J.; Brinkmann, R.P.; Mussenbrock, T.; Derzsi, A.; Korolov, I.; Donko, Z.; Schungel, E.; Schulze, J.

Publisher: IEEE

Year: 2014

Complex Electron Heating in Capacitive Multi-Frequency Plasmas

Type: Journal Paper

Author : Schulze, J.; Schü ngel, Edmund; Derzsi, A.; Korolov, I.; Mussenbrock, Thomas; Donkó , Zoltá n

Publisher: IEEE

Year: 2014

Author

Derzsi, A. (4)

Korolov, I. (4)

Schulze, J. (4)

Donko, Z. (3)

Schuengel, E. (2)

, Zolta&#x0301 (1)

Brinkmann, R.P. (1)

Donko&#x0301 (1)

Mussenbrock, T. (1)

Mussenbrock, Thomas (1)

Publisher

IEEE (4)

Year

2014 (4)

Keywords

n teaching (2)

Ar (1)

argon (1)

art (1)

boundary sheath edges (1)

capacitive multifrequency plasmas (1)

complex spatiotemporal electron heating dynamics (1)

computer aided instruction (1)

electrically induced asymmetry (1)

Electrodes (1)

Type

Conference Paper (3)

Journal Paper (1)

Language (ISO)

English (4)

Content Type

Metadata Only (4)

Publication Title

lasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BE (3)

Plasma Science, IEEE Transactions on (1)

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