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Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching

Type: Journal Paper

Author : Tseng, Victor Farm-Guoo; Huikai Xie

Publisher: IEEE

Year: 2014

RF Characteristic Analysis Model Extraction on the Stacked Metal–Insulator–Metal Capacitors for Radio Frequency Applications

Type: Journal Paper

Author : Woo Suk Sul; Sung Gyu Pyo

Publisher: IEEE

Year: 2014

Analysis of nanotextured ZnO surfaces for biosensing applications

Type: Conference Paper

Author : Jacobs, Michael; Muthukumar, Sriram; Munje, Rujuta; Quadri, Bilal; Prasad, Shalini

Publisher: IEEE

Year: 2014

A Reliable Si<sub>3</sub>N<sub>4</sub>/Al<sub>2</sub>O<sub>3</sub>-HfO<sub>2</sub> Stack MIM Capacitor for High-Voltage Analog Applications

Type: Journal Paper

Author : Ching-Sung Ho; San-Jung Chang; Shih-Chang Chen; Liou, Juin J.; Hongge Li

Publisher: IEEE

Year: 2014

Author

Ching-Sung Ho (1)

Hongge Li (1)

Huikai Xie (1)

Jacobs, Michael (1)

Liou, Juin J. (1)

Munje, Rujuta (1)

Muthukumar, Sriram (1)

Prasad, Shalini (1)

Quadri, Bilal (1)

San-Jung Chang (1)

Publisher

IEEE (4)

Year

2014 (4)

Keywords

capacitors (3)

MIM devices (3)

/sub&gt (2)

2&lt (2)

capacitance density (2)

equivalent circuits (2)

sub&gt (2)

-Al&lt (1)

-HfO&lt (1)

-ZrO&lt (1)

Type

Journal Paper (3)

Conference Paper (1)

Language (ISO)

English (4)

Content Type

Metadata Only (4)

Publication Title

Electron Devices, IEEE Transactions on (3)

anotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on (1)

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