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Unusual Cathode Erosion Patterns Observed for Steered Arc Sources

Type: Journal Paper

Author : Kolbeck, Jonathan; Anders, Andre

Publisher: IEEE

Year: 2014

Fast Time Resolved Techniques as Key to the Understanding of Energy and Particle Transport in HPPMS-Plasmas

Type: Journal Paper

Author : Maszl, Christian; Breilmann, Wolfgang; Berscheid, Lars; Benedikt, J.; von Keudell, Achim

Publisher: IEEE

Year: 2014

Author

Anders, Andre (1)

Benedikt, J. (1)

Berscheid, Lars (1)

Breilmann, Wolfgang (1)

Kolbeck, Jonathan (1)

Maszl, Christian (1)

von Keudell, Achim (1)

Publisher

IEEE (2)

Year

2014 (2)

Keywords

argon (2)

plasma diagnostics (2)

plasma sources (2)

pressure 0.5 Pa (2)

/sub&gt (1)

/sup&gt (1)

1+&lt (1)

2&lt (1)

Ar&lt (1)

Ar-I line phase resolved optical emission spectroscopy (1)

Type

Journal Paper (2)

Language (ISO)

English (2)

Content Type

Metadata Only (2)

Publication Title

Plasma Science, IEEE Transactions on (2)

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