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Optimal Magnetic Field Path Designs for Enhanced Depositions of DC Magnetron Sputter

Type: Journal Paper

Author : Cheng-Tsung Liu; Chang-Chou Hwang; Chih-Wen Chang

Publisher: IEEE

Year: 2014

Ferroelectric Cathode Electron Emission Dependence on Magnetic Field

Type: Journal Paper

Author : Orbach, Y.; Pilossof, M.; Einat, M.

Publisher: IEEE

Year: 2014

Author

Chang-Chou Hwang (1)

Cheng-Tsung Liu (1)

Chih-Wen Chang (1)

Einat, M. (1)

Orbach, Y. (1)

Pilossof, M. (1)

Publisher

IEEE (2)

Year

2014 (2)

Keywords

3D field information (1)

annular FE electron gun (1)

Ar (1)

argon (1)

argon ion bombardments (1)

atomic force microscopy (1)

Atomic layer deposition (1)

breakdown effects (1)

Cathodes (1)

cathodes (1)

Type

Journal Paper (2)

Language (ISO)

English (2)

Content Type

Metadata Only (2)

Publication Title

Electron Devices, IEEE Transactions on (1)

Magnetics, IEEE Transactions on (1)

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