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Reduced Residual Stress Curvature and Branched Comb Fingers Increase Sensitivity of MEMS Acoustic Sensor

Type: Journal Paper

Author : Downey, Richard H.; Karunasiri, G.

Publisher: IEEE

Year: 2014

International workshop on open and original problems in software language engineering

Type: Conference Paper

Author : Bagge, A.H. , Zaytsev, V.

Publisher: IEEE

Year: 2014

Long-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors

Type: Journal Paper

Author : Prasad, M.; Sahula, Vineet; Khanna, Vinod Kumar

Publisher: IEEE

Year: 2014

ZnO Etching and Microtunnel Fabrication for High-Reliability MEMS Acoustic Sensor

Type: Journal Paper

Author : Prasad, M.; Sahula, Vineet; Khanna, Vinod Kumar

Publisher: IEEE

Year: 2014

Author

Khanna, Vinod Kumar (2)

Prasad, M. (2)

Sahula, Vineet (2)

Bagge, A.H. , Zaytsev, V. (1)

Downey, Richard H. (1)

Karunasiri, G. (1)

Publisher

IEEE (4)

Year

2014 (4)

Keywords

microsensors (4)

ZnO (3)

Acoustic measurements (2)

Capacitance (2)

II-VI semiconductors (2)

MEMS acoustic sensors (2)

microfabrication (2)

Si (2)

silicon diaphragm (2)

wide band gap semiconductors (2)

Type

Journal Paper (3)

Conference Paper (1)

Language (ISO)

English (4)

Content Type

Metadata Only (4)

Publication Title

Device and Materials Reliability, IEEE Transactions on (2)

Microelectromechanical Systems, Journal of (1)

oftware Maintenance, Reengineering and Reverse Engineering (CSMR-WCRE), 2014 Software Evolution Week (1)

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