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Study and Improvement on Tungsten Plug Corrosion in CMP Process for PCRAM

Type: Journal Paper

Author : Ying Li; Zhitang Song; Bo Liu; Guanping Wu; Songlin Feng

Publisher: IEEE

Year: 2014

Design of a Breath Analysis System for Diabetes Screening and Blood Glucose Level Prediction

Type: Journal Paper

Author : Ke Yan; Zhang, Dejing; Darong Wu; Hua Wei; Guangming Lu

Publisher: IEEE

Year: 2014

Optical and Glow Diagnostics of 13.56-MHz RF Plasma-PVDF Membrane Surface Interactions

Type: Journal Paper

Author : Chun Huang; Ching-Yuan Tsai; Wei-Chun Ma; Kuan-Ying Lai

Publisher: IEEE

Year: 2014

Author

Bo Liu (1)

Ching-Yuan Tsai (1)

Chun Huang (1)

Darong Wu (1)

Guangming Lu (1)

Guanping Wu (1)

Hua Wei (1)

Ke Yan (1)

Kuan-Ying Lai (1)

Songlin Feng (1)

Publisher

IEEE (3)

Year

2014 (3)

Keywords

Chemica (2)

13.56-MHz radio frequency argon plasma-poly(vinylidene fluoride) membrane surface interactions (1)

13.56-MHz RF plasma-PVDF membrane surface interactions (1)

Accuracy (1)

acidic buff slurry effect (1)

alkali buff slurry effect (1)

alveolar air (1)

Ar (1)

Argon (1)

argon (1)

Type

Journal Paper (3)

Language (ISO)

English (3)

Content Type

Metadata Only (3)

Publication Title

Biomedical Engineering, IEEE Transactions on (1)

Plasma Science, IEEE Transactions on (1)

Semiconductor Manufacturing, IEEE Transactions on (1)

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