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electrostatic inchworm motor (1)
electrostatic induction (1)
electrostatic MEMS actuators (1)
electrostatic motors (1)
electrostatic side-drive rotary stage (1)
electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (1)
electrostatically actuated microbeam (1)
Electrostatically actuated microplate (1)
Electrostatically actuated nano-cantilevers (1)
electrostatically actuated nano/micromirrors (1)
