450mm metrology and inspection: The current state and the road ahead
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Year
: 2014DOI: 10.1109/ICITCS.2014.7021785
Keyword(s): Array signal processing,Physical layer,Rician channels,Security,Signal to noise ratio,Vectors,Wireless communication
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450mm metrology and inspection: The current state and the road ahead
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| contributor author | Cottle, R. , Yathapu, N. , Sieg, K. | |
| date accessioned | 2020-03-12T20:01:50Z | |
| date available | 2020-03-12T20:01:50Z | |
| date issued | 2014 | |
| identifier other | 6847018.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/999176 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | 450mm metrology and inspection: The current state and the road ahead | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8119481 | |
| subject keywords | Array signal processing | |
| subject keywords | Physical layer | |
| subject keywords | Rician channels | |
| subject keywords | Security | |
| subject keywords | Signal to noise ratio | |
| subject keywords | Vectors | |
| subject keywords | Wireless communication | |
| identifier doi | 10.1109/ICITCS.2014.7021785 | |
| journal title | dvanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI | |
| filesize | 401840 | |
| citations | 0 |