Capacitive RF MEMS switches using ultrananocrystalline diamond films
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Year
: 2014DOI: 10.1109/REDW.2014.7004571
Keyword(s): Ion beams,Ions,MOSFET,Radiation effects,Scattering,Silicon
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Capacitive RF MEMS switches using ultrananocrystalline diamond films
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| contributor author | Lebedeva, A. , Alagashev, G. | |
| date accessioned | 2020-03-12T19:54:24Z | |
| date available | 2020-03-12T19:54:24Z | |
| date issued | 2014 | |
| identifier other | 6839200.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/994648 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Capacitive RF MEMS switches using ultrananocrystalline diamond films | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8114079 | |
| subject keywords | Ion beams | |
| subject keywords | Ions | |
| subject keywords | MOSFET | |
| subject keywords | Radiation effects | |
| subject keywords | Scattering | |
| subject keywords | Silicon | |
| identifier doi | 10.1109/REDW.2014.7004571 | |
| journal title | lectrical and Electronic Engineering Conference (ElConRusNW), Proceedings of the 2014 IEEE NW Russia | |
| filesize | 594928 | |
| citations | 1 |