Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE
نویسنده:
, , , , ,سال
: 2014
چکیده: In this work, a fully clamped micro-beam is modeled using commercial FEM software (COMSOL
Multiphysics). The model is designed to investigate the pull-in instability of the micro-beam under the effect of
electrostatic field induced by the applied voltage. To this end, the device is modeled in 2-D space which has
rapid calculation procedure and decreases time and cost of calculation. The micro-beam is also modeled in 3-D space which is more pursuant to the reality and its results are quite compatible with previous works in the
literature. Finally effects of different characteristics of micro-beam including material and geometrical
properties are investigated on pull-in voltage using Taguchi DOE.
Multiphysics). The model is designed to investigate the pull-in instability of the micro-beam under the effect of
electrostatic field induced by the applied voltage. To this end, the device is modeled in 2-D space which has
rapid calculation procedure and decreases time and cost of calculation. The micro-beam is also modeled in 3-D space which is more pursuant to the reality and its results are quite compatible with previous works in the
literature. Finally effects of different characteristics of micro-beam including material and geometrical
properties are investigated on pull-in voltage using Taguchi DOE.
کلیدواژه(گان): Micro-beam,Pull-in voltage,COMSOL Multiphysics,FEM,Taguchi DOE
کالکشن
:
-
آمار بازدید
Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE
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| contributor author | آرمان محسن زاده | en |
| contributor author | مسعود طهانی | en |
| contributor author | سروش دقیقه رضائی | en |
| contributor author | Arman Mohsenzadeh | fa |
| contributor author | Masoud Tahani | fa |
| contributor author | Soroosh Daqiqeh Rezaei | fa |
| date accessioned | 2020-06-06T14:13:37Z | |
| date available | 2020-06-06T14:13:37Z | |
| date copyright | 2/18/2014 | |
| date issued | 2014 | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/3387731 | |
| description abstract | In this work, a fully clamped micro-beam is modeled using commercial FEM software (COMSOL Multiphysics). The model is designed to investigate the pull-in instability of the micro-beam under the effect of electrostatic field induced by the applied voltage. To this end, the device is modeled in 2-D space which has rapid calculation procedure and decreases time and cost of calculation. The micro-beam is also modeled in 3-D space which is more pursuant to the reality and its results are quite compatible with previous works in the literature. Finally effects of different characteristics of micro-beam including material and geometrical properties are investigated on pull-in voltage using Taguchi DOE. | en |
| language | English | |
| title | Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE | en |
| type | Conference Paper | |
| contenttype | External Fulltext | |
| subject keywords | Micro-beam | en |
| subject keywords | Pull-in voltage | en |
| subject keywords | COMSOL Multiphysics | en |
| subject keywords | FEM | en |
| subject keywords | Taguchi DOE | en |
| identifier link | https://profdoc.um.ac.ir/paper-abstract-1040234.html | |
| conference title | The First International Conference on MEMS and Microfabrication | en |
| conference location | Tehran | fa |
| identifier articleid | 1040234 |