Adhesion Property of Copper Nitride Film to Silicon Oxide Substrate
سال
: 1998شناسه الکترونیک: 10.1023/a:1006626124472
کالکشن
:
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آمار بازدید
Adhesion Property of Copper Nitride Film to Silicon Oxide Substrate
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| contributor author | S. O. Chwa | |
| contributor author | K. H. Kim | |
| date accessioned | 2020-03-14T13:32:39Z | |
| date available | 2020-03-14T13:32:39Z | |
| date issued | 1998 | |
| identifier other | 2ugkUUIaV_Iv7fxk9wFbmp6_1_fK0t5IOJ4K0hYoJQ1ELtzbyf.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1658878 | |
| format | general | |
| language | English | |
| title | Adhesion Property of Copper Nitride Film to Silicon Oxide Substrate | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 11913434 | |
| identifier doi | 10.1023/a:1006626124472 | |
| coverage | Academic | |
| pages | 1835-1838 | |
| journal volume | 17 | |
| journal issue | 21 | |
| filesize | 112321 | |
| citations | 0 |