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Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation

contributor authorde Koninck, David /A/.
contributor authorMolina-Lopez, Francisco
contributor authorBriand, Danick
contributor authorde Rooij, Nico F.
date accessioned2020-03-13T00:06:59Z
date available2020-03-13T00:06:59Z
date issued2014
identifier issn1057-7157
identifier other6825797.pdf
identifier urihttp://libsearch.um.ac.ir:80/fum/handle/fum/1134961?show=full
formatgeneral
languageEnglish
publisherIEEE
titleFoil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
typeJournal Paper
contenttypeMetadata Only
identifier padid8316379
subject keywordselectroplating
subject keywordsfoils
subject keywordsink jet printing
subject keywordsmicroactuators
subject keywordsmicrofluidics
subject keywordspolymers
subject keywordssurface treatment
subject keywordsSU-8
subject keywordscleanroom-free fabrication process
subject keywordsdevice geometry
subject keywordselectroplating
subject keywordsfluid ejection
subject keywordsfoil-level inkjet-printed pyroMEMS balloon actuators
subject keywordsigniter
subject keywordsinflation height
subject keywordsinkjet printing
subject keywordsmicrofluidic devices
subject keywordson-chip pumping
subject keywordspolydimethylsiloxane
subject keywordspolyethylene terephthalate
subject keywordspolymeric foils
subject keywordspropellant loading
subject keywordspyrotechnical microelectromechanical systems balloon actuators
subject keywordssemianalytical model
identifier doi10.1109/JMEMS.2014.2314702
journal titleMicroelectromechanical Systems, Journal of
journal volume23
journal issue6
filesize3620026
citations0


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