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Model identification for perfect tracking control of PA10 robot arm with joint velocity servo driver

contributor authorShimizu, Masayuki
date accessioned2020-03-12T22:53:02Z
date available2020-03-12T22:53:02Z
date issued2014
identifier other7028070.pdf
identifier urihttp://libsearch.um.ac.ir:80/fum/handle/fum/1097868?show=full
formatgeneral
languageEnglish
publisherIEEE
titleModel identification for perfect tracking control of PA10 robot arm with joint velocity servo driver
typeConference Paper
contenttypeMetadata Only
identifier padid8238832
subject keywordsaccelerometers
subject keywordsn electronics packaging
subject keywordsn silicon-on-insulator
subject keywordsn thermal stresses
subject keywordsn MEMS sensors
subject keywordsn SOI sandwich differential capacitance accelerometer
subject keywordsn device bending
subject keywordsn glass electrode plates
subject keywordsn low stress package
subject keywordsn metal hermetic package case
subject keywordsn temperature compensation
subject keywordsn thermal stress
subject keywordsn thin silicon middle layer
subject keywordsn Accelerometers
subject keywordsn Electrodes
subject keywordsn Glass
subject keywordsn Sensors
subject keywordsn Silicon
subject keywordsn Stress
subject keywordsn Thermal stresses
subject keywordsn Accelerometer
subject keywordsn Capacitance
subject keywordsn D
identifier doi10.1109/NEMS.2014.6908822
journal titleystem Integration (SII), 2014 IEEE/SICE International Symposium on
filesize486542
citations0


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