Development of the post-chemical mechanical polishing cleaner suppressing galvanic corrosion between copper and the Co barrier metal
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: 2014DOI: 10.1109/ECTC.2014.6897411
Keyword(s): Kalman filters,n inertial systems,n magnetic sensors,n matrix algebra,n microsensors,n Kalman Filter,n MEMS based devices,n PCB warpage,n alignment parameters,n attitude and heading reference systems,n augmenting sensors,n body-local level frame transformation matrix,n gyroscopes,n inner inter-axis alignment error,n low-cost inertial sensors,n magnetic sensors,n micro AHRS,n micro electro mechanical systems based devices,n multi-axis MEMS dev
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Development of the post-chemical mechanical polishing cleaner suppressing galvanic corrosion between copper and the Co barrier metal
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| contributor author | Kusano, T. | |
| contributor author | Shibata, T. | |
| contributor author | Itou, A. | |
| contributor author | Mizutani, F. | |
| date accessioned | 2020-03-12T22:37:57Z | |
| date available | 2020-03-12T22:37:57Z | |
| date issued | 2014 | |
| identifier other | 7017264.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1089367 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Development of the post-chemical mechanical polishing cleaner suppressing galvanic corrosion between copper and the Co barrier metal | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8227570 | |
| subject keywords | Kalman filters | |
| subject keywords | n inertial systems | |
| subject keywords | n magnetic sensors | |
| subject keywords | n matrix algebra | |
| subject keywords | n microsensors | |
| subject keywords | n Kalman Filter | |
| subject keywords | n MEMS based devices | |
| subject keywords | n PCB warpage | |
| subject keywords | n alignment parameters | |
| subject keywords | n attitude and heading reference systems | |
| subject keywords | n augmenting sensors | |
| subject keywords | n body-local level frame transformation matrix | |
| subject keywords | n gyroscopes | |
| subject keywords | n inner inter-axis alignment error | |
| subject keywords | n low-cost inertial sensors | |
| subject keywords | n magnetic sensors | |
| subject keywords | n micro AHRS | |
| subject keywords | n micro electro mechanical systems based devices | |
| subject keywords | n multi-axis MEMS dev | |
| identifier doi | 10.1109/ECTC.2014.6897411 | |
| journal title | lanarization/CMP Technology (ICPT), 2014 International Conference on | |
| filesize | 126029 | |
| citations | 0 |