date accessioned | 2020-03-12T20:53:32Z | |
date available | 2020-03-12T20:53:32Z | |
date issued | 2014 | |
identifier other | 6911510.pdf | |
identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1029336?show=full | |
format | general | |
language | English | |
publisher | IEEE | |
title | A SoC Design and Implementation of H.264 Video Encoding System Based on FPGA | |
type | Conference Paper | |
contenttype | Metadata Only | |
identifier padid | 8154603 | |
subject keywords | chemical mechanical polishing | |
subject keywords | computerised control | |
subject keywords | particle counting | |
subject keywords | planarisation | |
subject keywords | process monitoring | |
subject keywords | semiconductor technology | |
subject keywords | slurries | |
subject keywords | CMP scratching | |
subject keywords | CMP slurry | |
subject keywords | CMP tool | |
subject keywords | IMFT production fab | |
subject keywords | POU | |
subject keywords | SDS | |
subject keywords | SlurryScope data | |
subject keywords | SlurryScope system | |
subject keywords | Vantage SlurryScope | |
subject keywords | chemical mechanical polishing | |
subject keywords | correlation coefficient | |
subject keywords | defect metrics | |
subject keywords | offline monitoring method | |
subject keywords | particle bin | |
subject keywords | particle count data | |
subject keywords | point of use | |
subject keywords | production wafer defects | |
subject keywords | size 1.0 mum to 1.2 mum | |
subject keywords | slurry distribution system | |
subject keywords | sl | |
identifier doi | 10.1109/ICPT.2014.7017243 | |
journal title | ntelligent Human-Machine Systems and Cybernetics (IHMSC), 2014 Sixth International Conference on | |
filesize | 251169 | |
citations | 0 | |
contributor rawauthor | Li, Zhenni , Li, Jingjiao , Zhao, Yue , Rong, Chaoqun , Ma, Ji | |