Show simple item record

date accessioned2020-03-12T20:53:32Z
date available2020-03-12T20:53:32Z
date issued2014
identifier other6911510.pdf
identifier urihttp://libsearch.um.ac.ir:80/fum/handle/fum/1029336?show=full
formatgeneral
languageEnglish
publisherIEEE
titleA SoC Design and Implementation of H.264 Video Encoding System Based on FPGA
typeConference Paper
contenttypeMetadata Only
identifier padid8154603
subject keywordschemical mechanical polishing
subject keywordscomputerised control
subject keywordsparticle counting
subject keywordsplanarisation
subject keywordsprocess monitoring
subject keywordssemiconductor technology
subject keywordsslurries
subject keywordsCMP scratching
subject keywordsCMP slurry
subject keywordsCMP tool
subject keywordsIMFT production fab
subject keywordsPOU
subject keywordsSDS
subject keywordsSlurryScope data
subject keywordsSlurryScope system
subject keywordsVantage SlurryScope
subject keywordschemical mechanical polishing
subject keywordscorrelation coefficient
subject keywordsdefect metrics
subject keywordsoffline monitoring method
subject keywordsparticle bin
subject keywordsparticle count data
subject keywordspoint of use
subject keywordsproduction wafer defects
subject keywordssize 1.0 mum to 1.2 mum
subject keywordsslurry distribution system
subject keywordssl
identifier doi10.1109/ICPT.2014.7017243
journal titlentelligent Human-Machine Systems and Cybernetics (IHMSC), 2014 Sixth International Conference on
filesize251169
citations0
contributor rawauthorLi, Zhenni , Li, Jingjiao , Zhao, Yue , Rong, Chaoqun , Ma, Ji


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record