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Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive

contributor authorDeng, Peigang , Ma, Wei
date accessioned2020-03-12T20:50:10Z
date available2020-03-12T20:50:10Z
date issued2014
identifier other6908793.pdf
identifier urihttp://libsearch.um.ac.ir:80/fum/handle/fum/1027252?locale-attribute=en&show=full
formatgeneral
languageEnglish
publisherIEEE
titleNonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive
typeConference Paper
contenttypeMetadata Only
identifier padid8152346
subject keywordselectric current control
subject keywordsenergy storage
subject keywordsfrequency control
subject keywordsphotovoltaic power systems
subject keywordspower generation dispatch
subject keywordspower grids
subject keywordspower system stability
subject keywordssolar power stations
subject keywordsvoltage control
subject keywordswind power plants
subject keywordscurrent uncontrollable RES
subject keywordsdispatchable generation
subject keywordselectric grid
subject keywordselectric power systems
subject keywordsenergy storage systems
subject keywordsfrequency control
subject keywordsgrid support functions
subject keywordsmassive integration analysis
subject keywordspower reference
subject keywordspower system stability
subject keywordspredictable generation
subject keywordsregulatory frameworks
subject keywordsrenewable en
identifier doi10.1109/ICRERA.2014.7016428
journal titleano/Micro Engineered and Molecular Systems (NEMS), 2014 9th IEEE International Conference on
filesize491595
citations1


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