A detection method of stick-slip state on wafer transfer surface and its sensor design
ناشر:
سال
: 2014شناسه الکترونیک: 10.1109/ISICIR.2014.7029493
کلیدواژه(گان): Choppers (circuits),Current measurement,Noise,Ocean temperature,Receivers,Telemetry,Temperature measurement,SOI-CMOS,chopper amplifier,high temperature electronics,low noise amplifier
کالکشن
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آمار بازدید
A detection method of stick-slip state on wafer transfer surface and its sensor design
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| date accessioned | 2020-03-12T20:43:00Z | |
| date available | 2020-03-12T20:43:00Z | |
| date issued | 2014 | |
| identifier other | 6885717.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1022910?locale-attribute=fa | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | A detection method of stick-slip state on wafer transfer surface and its sensor design | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8147715 | |
| subject keywords | Choppers (circuits) | |
| subject keywords | Current measurement | |
| subject keywords | Noise | |
| subject keywords | Ocean temperature | |
| subject keywords | Receivers | |
| subject keywords | Telemetry | |
| subject keywords | Temperature measurement | |
| subject keywords | SOI-CMOS | |
| subject keywords | chopper amplifier | |
| subject keywords | high temperature electronics | |
| subject keywords | low noise amplifier | |
| identifier doi | 10.1109/ISICIR.2014.7029493 | |
| journal title | echatronics and Automation (ICMA), 2014 IEEE International Conference on | |
| filesize | 694348 | |
| citations | 0 | |
| contributor rawauthor | Yanjie Liu , Jiang Wu , Kang Li , Haijun Han , Tao Liu |