date accessioned | 2020-03-12T20:40:58Z | |
date available | 2020-03-12T20:40:58Z | |
date issued | 2014 | |
identifier other | 6883644.pdf | |
identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1021749?show=full | |
format | general | |
language | English | |
publisher | IEEE | |
title | Coordinated beamforming with dynamic clustering: A stochastic geometry approach | |
type | Conference Paper | |
contenttype | Metadata Only | |
identifier padid | 8146450 | |
subject keywords | chemical mechanical polishing | |
subject keywords | cobalt | |
subject keywords | copper | |
subject keywords | corrosion inhibitors | |
subject keywords | pH | |
subject keywords | slurries | |
subject keywords | tantalum | |
subject keywords | CMP post cleaning step | |
subject keywords | CMP slurry | |
subject keywords | Co | |
subject keywords | Cu | |
subject keywords | Ta | |
subject keywords | chelating agent | |
subject keywords | chemical mechanical polishing | |
subject keywords | cobalt | |
subject keywords | copper | |
subject keywords | corrosion inhibitor | |
subject keywords | electrochemical behavior | |
subject keywords | electrochemical screening | |
subject keywords | galvanic corrosion | |
subject keywords | metal surfaces | |
subject keywords | pH value | |
subject keywords | surface protection | |
subject keywords | tantalum | |
subject keywords | Chemicals | |
subject keywords | Cobalt | |
subject keywords | Copper | |
subject keywords | Corrosion | |
subject keywords | Corrosion inhibitors | |
subject keywords | Slurries | |
identifier doi | 10.1109/ICPT.2014.7017286 | |
journal title | ommunications (ICC), 2014 IEEE International Conference on | |
filesize | 171523 | |
citations | 0 | |
contributor rawauthor | Namyoon Lee , Heath, R.W. , Morales-Jimenez, D. , Lozano, A. | |