Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics
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Year
: 2014DOI: 10.1109/EST.2014.15
Keyword(s): Accuracy,Algorithm design and analysis,Authentication,Heuristic algorithms,Pattern recognition,Support vector machines,Timing,Keystroke Dynamics,Test Reconstruction
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Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics
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| date accessioned | 2020-03-12T20:16:58Z | |
| date available | 2020-03-12T20:16:58Z | |
| date issued | 2014 | |
| identifier other | 6861115.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1008747 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8130673 | |
| subject keywords | Accuracy | |
| subject keywords | Algorithm design and analysis | |
| subject keywords | Authentication | |
| subject keywords | Heuristic algorithms | |
| subject keywords | Pattern recognition | |
| subject keywords | Support vector machines | |
| subject keywords | Timing | |
| subject keywords | Keystroke Dynamics | |
| subject keywords | Test Reconstruction | |
| identifier doi | 10.1109/EST.2014.15 | |
| journal title | eliability Physics Symposium, 2014 IEEE International | |
| filesize | 866122 | |
| citations | 0 | |
| contributor rawauthor | Southwick, R.G. , Sathiyanarayanan, R. , Bajaj, M. , Mehta, S. , Yamashita, T. , Gundapaneni, S. , Pandey, R.K. , Wu, E. , Murali, K.V.R.M. , Cohen, S. , Stathis, J. |