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Design Assessments of a Rectangular DC Magnetron Sputter for Extended Target Life and Faster Sputtering

Type: Journal Paper

Author : Cheng-Tsung Liu; Hsiao-Chun Yeh; He-Yu Chung; Chang-Chou Hwang

Publisher: IEEE

Year: 2014

Review: Performance analysis of space-time-frequency MIMO OFDM techniques

Type: Conference Paper

Author : Padmaja, C.; Malleswari, B.L.

Publisher: IEEE

Year: 2014

Unusual Cathode Erosion Patterns Observed for Steered Arc Sources

Type: Journal Paper

Author : Kolbeck, Jonathan; Anders, Andre

Publisher: IEEE

Year: 2014

Author

Anders, Andre (1)

Chang-Chou Hwang (1)

Cheng-Tsung Liu (1)

He-Yu Chung (1)

Hsiao-Chun Yeh (1)

Kolbeck, Jonathan (1)

Malleswari, B.L. (1)

Padmaja, C. (1)

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IEEE (3)

Year

2014 (3)

Keywords

Argon (2)

/sub&gt (1)

2&lt (1)

acoustoelectric effects (1)

active compensation magnetizations (1)

Ar-O&lt (1)

Arc discharges (1)

arcs (electric) (1)

argon (1)

argon electrons (1)

Type

Journal Paper (2)

Conference Paper (1)

Language (ISO)

English (3)

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Metadata Only (3)

Publication Title

dvances in Engineering and Technology Research (ICAETR), 2014 International Conference on (1)

Magnetics, IEEE Transactions on (1)

Plasma Science, IEEE Transactions on (1)

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