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Study and Improvement on Tungsten Plug Corrosion in CMP Process for PCRAM

Type: Journal Paper

Author : Ying Li; Zhitang Song; Bo Liu; Guanping Wu; Songlin Feng

Publisher: IEEE

Year: 2014

Analysis of flow characteristics through an artery with time dependent overlapping stenosis

Type: Conference Paper

Author : Bhatnagar, Amit; Shrivastav, R K

Publisher: IEEE

Year: 2014

Author

Bhatnagar, Amit (1)

Bo Liu (1)

Guanping Wu (1)

Shrivastav, R K (1)

Songlin Feng (1)

Ying Li (1)

Zhitang Song (1)

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IEEE (2)

Year

2014 (2)

Keywords

acidic buff slurry effect (1)

alkali buff slurry effect (1)

BEC (1)

bottom electrode contact (1)

Chemica (1)

chemical mechanical planarization (1)

chemical mechanical polishing (1)

CMP process (1)

Corrosion (1)

DRAM chips (1)

Type

Conference Paper (1)

Journal Paper (1)

Language (ISO)

English (2)

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Metadata Only (2)

Publication Title

dvances in Computing, Communications and Informatics (ICACCI, 2014 International Conference on (1)

Semiconductor Manufacturing, IEEE Transactions on (1)

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