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RISA coupled two degree of freedom pull-in model for micromirrors under capillary force
The current paper presents a two degree of freedom model for the problem of micromirrors under capillary force. The principal of minimum potential energy is employed for finding the equilibrium equations governing the deflection and the rotation...
CLOSED FORM SOLUTIONS FOR THE STATICAL BEHAVIOR OF MICROMIRRORS UNDER CAPILLARY FORCES
In this paper, the static behavior of micromirrors under
the effect of capillary forces is studied. First the
equation governing the static behavior of micromirrors
is obtained using both Newton method and minimum...
APPLICATION OF THE EXTENDED KANTOROVICH METHOD TO THE STATIC DEFLECTION OF MICROPLATES UNDER CAPILLARY FORCE
The aim of this paper is to apply an Extended Kantorovich method (EKM) to simulate the static deflection of microplates under capillary force. The model accounts for the capillary force nonlinearity of the excitation. Starting from a one term...
CLOSED FORM SOLUTIONS FOR THE PROBLEM OF STATICAL BEHAVIOR OF NANO/MICROMIRRORS UNDER THE EFFECT OF CAPILLARY FORCE AND VAN DER WAALS FORCE
The current paper deals with the problem of static
instability of Micro/Nano mirrors under the combined
effect of capillary force and van der Waals force. First
the governing equations of the statical behavior of...
ANALYTICAL SOLUTIONS FOR THE STATIC INSTABILITY OF MICRO/NANO MIRRORS UNDER THE COMBINED EFFECT OF CAPILLARY FORCE AND CASIMIR FORCE
This paper deals with the problem of static instability of
Micro/Nano mirrors under the combined effect of
capillary force and Casimir force. At the First the
governing equations of the statical behavior of...
Modeling of Pull-In Instability of Nano/Micromirrors Under the Combined Effect of Capillary and Casimir Forces
In the current article the effect of the Casimir force on the static behavior and pull-in characteristics of nano/micromirrors under capillary force is investigated. At the first, the dimensionless equation governing the static behavior of nano...
COUPLING EFFECTS BETWEEN TORSION AND BENDING IN TORSIONAL MICROMIRRORS UNDER CAPILLARY FORCES
functions theorem, the equations governing
the pull-in angle and pull-in displacement of the
micromirror is derived. The results, shows that ignoring
the bending effect in micromirrors under the effect of
capillary forces, can...
A COUPLED MODEL BETWEEN TORSION AND BENDING IN NANO/MICROMIRRORS UNDER THE COMBINED EFFECT OF VAN DER WAALS FORCE AND CAPILLARY FORCE
The coupling effect between torsion and bending in
nano/micromirrors under the combined effect of
capillary force and van der Waals (vdW) force is
presented in this paper. At the first, the dimensionless...
Static Pull-in Analysis of Micro-Cantilevers in Wet Etching Fabrication Process
Parallel micro actuators are mostly fabricated using the
wet etching process within which the presence of
capillary force and the resulting pull-in instabilities can
severely affect the success of the fabrication process. In...
Characterization of the static behavior of micromirrors under the effect of capillary force, an analytical approach
In this article, the static behavior of micromirrors under the effect of capillary force is studied. The dimensionless equations governing the static behavior and the pull-in state of the micromirror under capillary force are obtained...