The current paper presents a two degree of freedom model for the problem of micromirrors under capillary force. The principal of minimum potential energy is employed for finding the equilibrium equations governing the ...

to stabilize the tilt angle of a torsional micro-actuator within and beyond its pull-in limit. To do so, a 2-DOF model which takes into account both rotational and translational DOFs of the actuator is considered. Using an energy approach based on Lagrange...