Torsional micro-actuators have found variety of applications in optical switches, displays, interferometry, spectroscopy, aberration correction and biomedical imaging. The objective of this paper is to present a sophisticated fuzzy controller...

In this paper, problem of squeeze ¯lm damping in dual axis torsion microactuators is modeled and

closed form expressions are provided for damping torques around tilting axes of the actuator. The

Reynolds equation which governs...