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A novel pad conditioner and pad roughness effects on tungsten CMP

Type: Conference Paper

Author : Donghyun Lim; Hojoong Kim; Bongyoung Jang; Honglae Cho; Junyong Kim; Hasub Hwang

Publisher: IEEE

Year: 2014

The experimental study on relationship between shape of diamond and micro scratches

Type: Conference Paper

Author : Dong-won Oh; Hojoong Kim; Myung-sik Han; Ha-sub Hwang; Taesung Kim

Publisher: IEEE

Year: 2014

Author

Hojoong Kim (2)

Bongyoung Jang (1)

Dong-won Oh (1)

Donghyun Lim (1)

Ha-sub Hwang (1)

Hasub Hwang (1)

Honglae Cho (1)

Junyong Kim (1)

Myung-sik Han (1)

Taesung Kim (1)

Publisher

IEEE (2)

Year

2014 (2)

Keywords

carbon nanotubes (1)

flexible electronics (1)

n acid oxidation treatment (1)

n bandwidth degradation (1)

n C-NiP (1)

n carbon nanotube clusters (1)

n chemical modification (1)

n composite coatings (1)

n electrical devices (1)

n electroless coatings (1)

Type

Conference Paper (2)

Language (ISO)

English (2)

Content Type

Metadata Only (2)

Publication Title

lanarization/CMP Technology (ICPT), 2014 International Conference on (2)

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