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Anisotropic etching of profiled membrabes for pressure sensors based on silicon-on-insulator structure

Type: Conference Paper

Author : Evdokimov, S.P.

Publisher: IEEE

Year: 2014

The resonance pressure transducer with increased sensitivity

Type: Conference Paper

Author : Barinov, I.N.; Volkov, V.S.; Evdokimov, S.P.

Publisher: IEEE

Year: 2014

Author

Evdokimov, S.P. (2)

Barinov, I.N. (1)

Volkov, V.S. (1)

Publisher

IEEE (2)

Year

2014 (2)

Keywords

n computer science education (2)

n Software (2)

computer aided instruction (1)

computer based training (1)

n blended learning (1)

n cognitive load (1)

n Complexity theory (1)

n defects detection (1)

n distance learning (1)

n Education (1)

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Conference Paper (2)

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English (2)

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Metadata Only (2)

Publication Title

ctual Problems of Electron Devices Engineering (APEDE), 2014 International Conference on (2)

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