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Now showing items 1-7 of 7

Electron heating, mode transitions, and asymmetry effects in dusty single- and dual-frequency capacitive discharges

Type: Conference Paper

Author : Schungel, E.; Schulze, J.; Mohr, S.; Iwashita, S.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

Deposition of crystalline silicon thin films in electrically asymmetric capacitively coupled plasmas

Type: Conference Paper

Author : Schungel, E.; Schulze, J.; Mohr, S.; Hofmann, R.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

Ion flux uniformity in large area capacitively coupled dual-frequency discharges

Type: Conference Paper

Author : Schungel, E.; Schulze, J.; Mohr, S.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

The effect of structured electrodes on heating and plasma uniformity in capacitive discharges

Type: Conference Paper

Author : Schmidt, N.; Czarnetzki, U.; Schuengel, E.; Schulze, J.

Publisher: IEEE

Year: 2014

Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

Type: Journal Paper

Author : Mohr, S.; Schü ngel, Edmund; Schulze, J.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

The Glow in a Three-Body Recombination Dominated Afterglow

Type: Journal Paper

Author : Tsankov, Tsanko V.; Siepa, Sarah; Bö hm, Patrick S.; Luggenhö lscher, Dirk; Czarnetzki, U.

Publisher: IEEE

Year: 2014

Dust Hour Glass in a Capacitive RF Discharge

Type: Journal Paper

Author : Iwashita, S.; Schü ngel, Edmund; Schulze, J.; Hartmann, Peter; Donkó , Zoltá n; Uchida, Giichiro; Koga, Kazuya; Shiratani, Masaharu; Czarnetzki, U.

Publisher: IEEE

Year: 2014

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Electron heating, mode transitions, and asymmetry effects in dusty single- and dual-frequency capacitive discharges

Deposition of crystalline silicon thin films in electrically asymmetric capacitively coupled plasmas

Ion flux uniformity in large area capacitively coupled dual-frequency discharges

The effect of structured electrodes on heating and plasma uniformity in capacitive discharges

Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

The Glow in a Three-Body Recombination Dominated Afterglow

Dust Hour Glass in a Capacitive RF Discharge

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Electron heating, mode transitions, and asymmetry effects in dusty single- and dual-frequency capacitive discharges

Deposition of crystalline silicon thin films in electrically asymmetric capacitively coupled plasmas

Ion flux uniformity in large area capacitively coupled dual-frequency discharges

The effect of structured electrodes on heating and plasma uniformity in capacitive discharges

Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

The Glow in a Three-Body Recombination Dominated Afterglow

Dust Hour Glass in a Capacitive RF Discharge